projection optics meaning in Chinese

投射光学
投影光学

Design of telecentric beam path for zoom projection optics
变焦距投影光学系统中的远心光路设计
The projection optics with aspherical mirror of sub - nanometer accuracy are required to get a resolution of less than 0 . 1 m m and wide exposure area simultaneously . the precision of polishing and testing for such ashperical surface is fairly high and it has not been achieved yet in our current state
Euvl微缩投影物镜为了同时实现大的曝光视场和0 . 1 m以下的成像分辨率，微缩投影光学系统需采用面形精度达亚纳米量级的非球面，但我们现阶段的光学加工和检测技术距此要求尚有一定的差距。
It might preferable , however , to use shperical mirror for the first step studies of euvl in a series investigation of system design , component fabrication , assembly technique and experimental process . along this thought , the author designed a schwarzschild optics using spherical mirrors with 10 : 1 reduction projection optics
作为研究的第一步，出于进行euvl原理及系统设计、光学元件的制备、系统集成、掩模曝光实验等相关技术研究目的，采用球面schwarzschild微缩投影物镜是比较切实可行的技术方案。